L Broussous: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

Don't use scam websites

1

Industrial Challenges of TiN Hard Mask Wet Removal Process for 14nm Technology Node

Iwasaki, Akihisa, Courouble, Kristell, Lippy, Steven, Buisine, Fabrice, Ishikawa, Hidekazu, Cooper, Emanuel, Kennedy, Evelyn, Zoll, Stephane, Broussous, Lucile

Journal:

Solid State Phenomena

Year:

2014

Language:

english

File:

PDF, 1.82 MB

english, 2014

2

Hereditary Orders and Embeddings of Local Fields in Simple Algebras

Journal:

Journal of Algebra

Year:

1998

Language:

english

File:

PDF, 209 KB

english, 1998

3

Study of the post-etch cleaning compatibility with dense and porous ULK materials – characterization of the process impact

D. Rébiscoul, B. Puyrenier, L. Broussous, D. Louis, G. Passemard

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 366 KB

english, 2006

4

Electrochemical behavior of copper and cobalt in post-etch cleaning solutions

S. Bilouk, L. Broussous, R.P. Nogueira, V. Ivanova, C. Pernel

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 990 KB

english, 2009

5

Acyclicity of Schneider and Stuhler's coefficient systems: another approach in the level 0 case

Journal:

Journal of Algebra

Year:

2004

Language:

english

File:

PDF, 217 KB

english, 2004

6

Porosity and structure evolution of a SiOCH low k material during post-etch cleaning process

L. Broussous, W. Puyrenier, D. Rebiscoul, V. Rouessac, A. Ayral

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 195 KB

english, 2007

7

Mechanical properties of a plasma-modified porous low-k material

L. Broussous, G. Berthout, D. Rébiscoul, V. Rouessac, A. Ayral

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 350 KB

english, 2010

8

Building ofGL(m, D)and centralizers

P. Broussous, B. Lemaire

Journal:

Transformation Groups

Year:

2002

Language:

english

File:

PDF, 1.98 MB

english, 2002

9

Simplicial complexes lying equivariantly over the affine building of GL(N)

Journal:

Mathematische Annalen

Year:

2004

Language:

english

File:

PDF, 228 KB

english, 2004

10

Pure elements and intertwining classes of simple strata in local central simple algebras

Broussous, Paul, Grabitz, Martin

Journal:

Communications in Algebra

Year:

2000

Language:

english

File:

PDF, 1.43 MB

english, 2000

11

[IEEE IEEE 2002 International Interconnect Technology Conference - Burlingame, CA, USA (3-5 June 2002)] Proceedings of the IEEE 2002 International Interconnect Technology Conference (Cat. No.02EX519) - Characterization of photoresist poisoning induced by a post etch stripping step

Lamy, S., Louveau, O., Fanget, G., Fayolle, M., Rochat, N., Louis, D., Broussous, L.

Year:

2002

Language:

english

File:

PDF, 222 KB

english, 2002

12

[IEEE IEEE International Interconnect Technology Conference - Burlingame, CA, USA (2-4 June 2003)] Proceedings of the IEEE 2003 International Interconnect Technology Conference (Cat. No.03TH8695) - Porous dielectric dual damascene patterning issues for 65 nm node: can architecture bring a solution?

Assous, M., Simon, J., Broussous, L., Bourlot, C., Fayolle, M., Louveau, O., Roman, A., Tabouret, E., Feldis, H., Louis, D., Torres, J.

Year:

2003

Language:

english

File:

PDF, 264 KB

english, 2003

13

[IEEE 2008 International Interconnect Technology Conference - IITC - Burlingame, CA, USA (2008.06.1-2008.06.4)] 2008 International Interconnect Technology Conference - Post-Etch Cleaning for Porous Low K Integration: Impact of HF wet etch on "Pore-sealing" and "k recovery"

Broussous, L., Puyrenier, W., Rebiscoul, D., Rouessac, V., Ayral, A.

Year:

2008

Language:

english

File:

PDF, 579 KB

english, 2008

14

Post-Etch Cleaning Chemistries Evaluation for Low k-Copper Integration

Broussous, Lucile, Hinsinger, O., Favier, Sylvie, Besson, Pascal

Journal:

Solid State Phenomena

Year:

2003

File:

PDF, 428 KB

2003

15

Barrier and Copper Seedlayer Wet Etching

Richard, Claire Therese, Frank, M.M., Besson, Pascal, Serret, E., Hotellier, N., Beverina, Alessio, Dumas, L., Broussous, Lucile, Kovacs, F., Billon, Thierry

Journal:

Solid State Phenomena

Year:

2005

Language:

english

File:

PDF, 1.86 MB

english, 2005

16

Extension Du Formalisme De Bushnell Et Kutzko Au Cas D'une Algebre A Division

Journal:

Proceedings of the London Mathematical Society

Year:

1998

Language:

french

File:

PDF, 520 KB

french, 1998

17

Minimal strata for GL (m, D)

Journal:

Journal für die reine und angewandte Mathematik (Crelles Journal)

Year:

1999

Language:

english

File:

PDF, 613 KB

english, 1999

18

Is Hypospadias Associated with Prenatal Exposure to Endocrine Disruptors? A French Collaborative Controlled Study of a Cohort of 300 Consecutive Children Without Genetic Defect

Kalfa, Nicolas, Paris, Françoise, Philibert, Pascal, Orsini, Mattea, Broussous, Sylvie, Fauconnet-Servant, Nadège, Audran, Françoise, Gaspari, Laura, Lehors, Hélène, Haddad, Myriam, Guys, Jean-Michel,

Journal:

European Urology

Year:

2015

Language:

english

File:

PDF, 427 KB

english, 2015

19

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Cleaning Process in Single Wafer Tool: Impact of Dispersion Phenomena on Rinsing Time

Mallet, Antoine, Prat, Marc, Broussous, Lucile, Schmitz, Philippe

Year:

2009

Language:

english

File:

PDF, 2.35 MB

english, 2009

20

"Damage Free" Cleaning for Advanced BEOL Interconnections

Broussous, Lucile, Courouble, Kristell, Richard, Emmanuel, Pernel, Carole, Loup, Virginie, Lévy, Didier

Journal:

Solid State Phenomena

Year:

2012

Language:

english

File:

PDF, 1.69 MB

english, 2012

21

[IEEE 2014 IEEE 11th International Conference on Group IV Photonics - Paris (2014.8.27-2014.8.29)] 11th International Conference on Group IV Photonics (GFP) - Low cost 300mm double-SOI substrate for low insertion loss 1D & 2D grating couplers

Baudot, C., Dutartre, D., Souhaite, A., Vulliet, N., Jones, A., Ries, M., Mekis, A., Verslegers, L., Sun, P., Chi, Y., Cremer, S., Gourhant, O., Benoit, D., Courgoulet, G., Perrot, C., Broussous, L.,

Year:

2014

Language:

english

File:

PDF, 409 KB

english, 2014

22

Contact cleaning opportunities on single wafer tool

Broussous, L., Zoll, S., Ishikawa, H., Buisine, F., Lamaury, A.

Journal:

Microelectronic Engineering

Year:

2018

Language:

english

File:

PDF, 858 KB

english, 2018

23

ChemInform Abstract: Selective Catalytic Reduction of Nitrogen Monoxide by Decane on Copper- Exchanged Beta Zeolites.

G. DELAHAY, B. COQ, L. BROUSSOUS

Journal:

Year:

1997

File:

PDF, 30 KB

1997

24

Effect of plasma treatments on a porous low-k material – Study of pore sealing

Wilfried Puyrenier, Vincent Rouessac, Lucile Broussous, Diane Rébiscoul, André Ayral

Journal:

Microporous and Mesoporous Materials

Year:

2007

Language:

english

File:

PDF, 280 KB

english, 2007

25

Synthesis and evaluation of new arylbenzo[b]thiophene and diarylthiophene derivatives as inhibitors of the NorA multidrug transporter of Staphylococcus aureus

Jérémie Fournier dit Chabert, Béatrice Marquez, Luc Neville, Lionel Joucla, Sylvie Broussous, Pascale Bouhours, Emilie David, Stéphane Pellet-Rostaing, Bernard Marquet, Nicole Moreau, Marc Lemaire

Journal:

Bioorganic & Medicinal Chemistry

Year:

2007

Language:

english

File:

PDF, 313 KB

english, 2007

26

Characterization of the impact of plasma treatments and wet cleaning on a porous low k material

W. Puyrenier, V. Rouessac, L. Broussous, D. Rébiscoul, A. Ayral

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 271 KB

english, 2006

27

Integrated monitoring of ULK dielectrics out-gassing and measurement of pore sealing efficiency by residual gas analysis technique

R. Delsol, L. Chapelon, H. Chaabouni, L. Broussous, M. Schellenberger, A. Ostrovski, P. Normandon

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 205 KB

english, 2007

28

Study of solvent penetration inside a porous low k material by neutron reflectometry – Influence of material surface modifications and of solvent properties

D. Rébiscoul, L. Broussous, W. Puyrenier, V. Rouessac, A. Ayral, R. Cubitt

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 268 KB

english, 2008

29

Palladium mediated direct coupling of silylated arylalkynes with propargylic chlorides: an efficient access to functionalized conjugated allenynes

Delphine Girard, Sylvie Broussous, Olivier Provot, Jean-Daniel Brion, Mouâd Alami

Journal:

Tetrahedron Letters

Year:

2007

Language:

english

File:

PDF, 153 KB

english, 2007

30

Hydrodynamic aspects of filtration antifouling by helically corrugated membranes

L Broussous, P Schmitz, H Boisson, E Prouzet, A Larbot

Journal:

Chemical Engineering Science

Year:

2000

Language:

english

File:

PDF, 400 KB

english, 2000

31

Integration of Cu/SiOC in Cu dual damascene interconnect for 0.1-μm technology

M Fayolle, J Torres, G Passemard, F Fusalba, G Fanget, D Louis, M Assous, O Louveau, M Rivoire, K Haxaire, M Mourier, S Maitrejean, P Besson, L Broussous, L Arnaud, H Feldis

Journal:

Microelectronic Engineering

Year:

2002

Language:

english

File:

PDF, 1.51 MB

english, 2002

32

Immeuble du groupe linéaire sur une algèbre à division et centralisateurs

Journal:

Comptes Rendus de l'Académie des Sciences - Series I - Mathematics

Year:

1999

File:

PDF, 245 KB

1999

33

Un théorème de finitude(A Theorem of Finitude)

Alexandru Ioan Badulescu, Paul Broussous

Journal:

Compositio Mathematica

Year:

2002

File:

PDF, 161 KB

2002

34

Un revêtement de l'arbre de GL2d'un corps local

Journal:

Compositio Mathematica

Year:

2003

File:

PDF, 142 KB

2003

35

Selective catalytic reduction of nitrogen monoxide by decane on copper-exchanged beta zeolites

G. Delahay, B. Coq, L. Broussous

Journal:

Applied Catalysis B: Environmental

Year:

1997

Language:

english

File:

PDF, 756 KB

english, 1997

36

New ceramic membranes designed for crossflow filtration enhancement

L Broussous, P Schmitz, E Prouzet, L Becque, A Larbot

Journal:

Separation and Purification Technology

Year:

2001

Language:

english

File:

PDF, 199 KB

english, 2001

37

An experimental study of helically stamped ceramic microfiltration membranes using bentonite suspensions

L Broussous, E Prouzet, L Beque, A Larbot

Journal:

Separation and Purification Technology

Year:

2001

Language:

english

File:

PDF, 256 KB

english, 2001

38

Microfiltration of beer yeast suspensions through stamped ceramic membranes

J Stopka, S.G Bugan, L Broussous, Š Schlosser, A Larbot

Journal:

Separation and Purification Technology

Year:

2001

Language:

english

File:

PDF, 227 KB

english, 2001

39

Stamped ceramic porous tubes for tangential filtration

L Broussous, J.C Ruiz, A Larbot, L Cot

Journal:

Separation and Purification Technology

Year:

1998

Language:

english

File:

PDF, 175 KB

english, 1998

40

Structure of SnO2 alcosols and films prepared by sol–gel dip coating

A.P. Rizzato, L. Broussous, C.V. Santilli, S.H. Pulcinelli, A.F. Craievich

Journal:

Journal of Non-Crystalline Solids

Year:

2001

Language:

english

File:

PDF, 365 KB

english, 2001

41

Synthesis of novel 3′-methyl-5′-norcarbocyclic nucleoside phosphonates as potential anti-HIV agents

Uttaro, Jean-Pierre, Broussous, Sylvie, Mathé, Christophe, Périgaud, Christian

Journal:

Year:

2013

Language:

english

File:

PDF, 438 KB

english, 2013

42

[IEEE 2013 IEEE International Electron Devices Meeting (IEDM) - Washington, DC, USA (2013.12.9-2013.12.11)] 2013 IEEE International Electron Devices Meeting - A multi-wavelength 3D-compatible silicon photonics platform on 300mm SOI wafers for 25Gb/s applications

Boeuf, F., Cremer, S., Vulliet, N., Pinguet, T., Mekis, A., Masini, G., Verslegers, L., Sun, P., Ayazi, A., Hon, N.-K., Sahni, S., Chi, Y., Orlando, B., Ristoiu, D., Farcy, A., Leverd, F., Broussous,

Year:

2013

Language:

english

File:

PDF, 2.64 MB

english, 2013

43

Depth-resolved impact of integration process on porosity and solvent diffusion in a SiOCH low-kmaterial

Lépinay, M., Djourelov, N., Marinov, H., Broussous, L., Courouble, K., Licitra, C., Bertin, F., Rouessac, V., Ayral, A.

Journal:

Journal of Porous Materials

Year:

2014

Language:

english

File:

PDF, 1.14 MB

english, 2014

44

SAXS Study of Formation and Growth of Tin Oxide Nanoparticles in the Presence of Complexing Ligands

Broussous, L., Santilli, C. V., Pulcinelli, S. H., Craievich, A. F.

Journal:

Journal of Physical Chemistry B

Year:

2002

Language:

english

File:

PDF, 90 KB

english, 2002

45

[IEEE IEEE International Interconnect Technology Conference - Burlingame, CA, USA (2-4 June 2003)] Proceedings of the IEEE 2003 International Interconnect Technology Conference (Cat. No.03TH8695) - General review of issues and perspectives for advanced copper interconnections using air gap as ultra-low K material

Gosset, L.G., Arnal, V., Prindle, C., Hoofman, R., Verheijden, G., Daamen, R., Broussous, L., Fusalba, F., Assous, M., Chatterjee, R., Torres, J., Gravesteijn, D., Yu, K.C.

Year:

2003

Language:

english

File:

PDF, 291 KB

english, 2003

46

ToF-SIMS spectra multivariate analyses for the chemical characterization of microelectronic low-k materials

Scarazzini, R., Lépinay, M., Broussous, L., Barnes, J. P., Veillerot, M., Jousseaume, V.

Journal:

Surface and Interface Analysis

Year:

2014

Language:

english

File:

PDF, 350 KB

english, 2014

47

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Electrochemical Behavior of Copper in Post-Via-Etch Cleaning Solutions

Bilouk, Sabrina, Pernel, Carole, Nogueira, Ricardo P., Broussous, Lucile, Haumesser, Paul-Henri, Passemard, Gerard

Year:

2007

Language:

english

File:

PDF, 692 KB

english, 2007

48

Predicting Adsorption on Bare and Modified Silica Surfaces

Lépinay, Matthieu, Broussous, Lucile, Licitra, Christophe, Bertin, François, Rouessac, Vincent, Ayral, André, Coasne, Benoit

Journal:

The Journal of Physical Chemistry C

Year:

2015

Language:

english

File:

PDF, 1.58 MB

english, 2015

49

Copper Surface Analysis with ToF-SIMS: Spectra Interpretation and Stability Issues

Trouiller, Chantal, Petitdidier, Sébastien, Ravanel, X., Broussous, Lucile, Juhel, M., Kwakman, L.F.Tz., Wyon, C.

Journal:

Solid State Phenomena

Year:

2008

Language:

english

File:

PDF, 271 KB

english, 2008

50

Impact of Organic Acid and Gas Bubbling on Copper and Copper Oxide Etch-Rates in Diluted HF Solution

Rébiscoul, Diane, Lopez, N., Broussous, Lucile, Louis, Didier, Passemard, G.

Journal:

Solid State Phenomena

Year:

2008

Language:

english

File:

PDF, 262 KB

english, 2008

To build up a library is to create a life. It’s never just a random collection of books.

— Carlos María Domínguez

Official channel

Z-Library Desktop Launcher

Z-Library Since 2009 support@z-lib.do

EnglishРусскийEspañolItalianoελληνικάاللغة العربيةBahasa IndonesiaBahasa Malaysiaहिन्दीDeutschFrançaisPortuguêsУкраїнськаPolski中文繁體中文日本語Tiếng ViệtAzərbaycan DiliՀայոց լեզուภาษาไทยTürk Diliქართველიবাংলাپښتوతెలుగుاردو한국어SrpskiБългарски